Compact SAWaerosol generator
A Winkler, S Harazim, DJ Collins, R Bruenig, H Schmidt, SB Menzel
Biomedical Microdevices | SPRINGER | Published : 2017
Awarded by German Research Foundation (DFG Grant)
Awarded by Federal Ministry of Education and Research (BMBF InnoProfile-Transfer)
This work was funded by the German Research Foundation (DFG Grant WI 4140/2-1) and the Federal Ministry of Education and Research (BMBF InnoProfile-Transfer 03IPT610A). The authors wish to gratefully thank S. Nestler (IFW Dresden) for her kind assistance with SU-8 lithography, P. Bergelt (TU Dresden) for his assistance with Laser diffraction measurements, the IFW workshop for production of the demonstrator and Ofer Manor (Technion, Israel) for helpful discussions.