Conference Proceedings

ION-BEAM-INDUCED CHARGE-COLLECTION IMAGING OF CMOS ICS

FW SEXTON, KM HORN, BL DOYLE, JS LAIRD, M CHOLEWA, A SAINT, GJF LEGGE

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | ELSEVIER SCIENCE BV | Published : 1993