Conference Proceedings

Damage in III-V compounds during focused ion beam milling

S Rubanov, PR Munroe

MICROSCOPY AND MICROANALYSIS | CAMBRIDGE UNIV PRESS | Published : 2005

DOI: 10.1017/S1431927605050294

University of Melbourne Researchers

A/Prof Sergey Rubanov Author

Citation metrics

52Web of Science

Keywords

Semiconducting Material

Specimen Preparation Technique

Science & Technology

Sample Preparation

Materials Science

Focused Ion Beam

Materials Science, Multidisciplinary

Transmission Electron Microscopy

Transmission Electron-Microscopy