Conference Proceedings

Effects of Miscut Substrates on Electrical Conductivity Across InP and GaAs Wafer-Bonded Structures

J Mc Kay, M Seal, K Yeung, M Jackson, MS Goorsky, H Moriceau (ed.), H Baumgart (ed.), MS Goorsky (ed.), KD Hobart (ed.), R Knechtel (ed.), T Suga (ed.), CS Tan (ed.)

ECS Transactions | ELECTROCHEMICAL SOC INC | Published : 2014