Conference Proceedings

The structure of damage layers in transmission electron microscope specimens in elemental and compound semiconductors after FIB fabrication

PR Munroe, S Rubanov, AG Cullis (ed.), JL Hutchison (ed.)

MICROSCOPY OF SEMICONDUCTING MATERIALS 2001 | IOP PUBLISHING LTD | Published : 2001

University of Melbourne Researchers

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Keywords

Physical Sciences
Physics
Microscopy
Technology
Science & Technology
Physics, Multidisciplinary