Conference Proceedings

The investigation of charge transport properties of SOI semiconductor devices using a heavy ion microbeam

T Hirao, JS Laird, H Mori, S Onoda, H Itoh, H Tomokage (ed.), T Sekiguchi (ed.)

BEAM INJECTION ASSESSMENT OF MICROSTRUCTURES IN SEMICONDUCTORS, 2000 | TRANS TECH PUBLICATIONS LTD | Published : 2000