A comparative study of surface morphology, mechanical and tribological properties of DLC films deposited on Cr and Ni nanolayers

Abstract

Applying metallic interlayer between diamond-like carbon (DLC) and substrate is a promising method to improve the adhesion and efficiency of DLC films. Understanding how the interlayer parameters affect the properties of DLC coatings leads to production of long-time excellent performance of them. In this study, DLC films deposited by PECVD and 10, 20 and 40 nm layers of Ni and Cr were sputtered on silicon substrates to use as the adhesion layers. The role of chemical structure and physical parameters (surface roughness) of interlayers on the final properties of DLC films were investigated using atomic force microscopy (AFM), field emission scanning electron microscopy (FE-SEM), Raman spectro..