Hermetic fusion of diamond micro-components with silicon

Melanie EM Stamp; Alastair Stacey; Kate Fox; Steven Prawer; David J Garrett

Journal article

Hermetic fusion of diamond micro-components with silicon

Melanie EM Stamp, Alastair Stacey, Kate Fox, Steven Prawer, David J Garrett

DIAMOND AND RELATED MATERIALS | ELSEVIER SCIENCE SA | Published : 2020

DOI: 10.1016/j.diamond.2020.107972

Abstract

Implantable devices which interact with neuronal systems and last for the lifetime of the recipient are an emerging field in medical research, diagnostics and therapeutics. These devices often contain sensitive micro-electronics ranging from passive radio-frequency identification tags to active sensors and stimulators. Therefore, such devices require robust and biocompatible packaging. There is a strong desire to reduce the size of such devices, enable wireless communication methods and protect these devices in the body for many decades. Diamond is a biopermanent material that provides the chemical inertness and mechanical stability to ensure long operational life of implanted devices and ca..

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University of Melbourne Researchers

Steven Prawer Author Physics

Melanie Stamp Author Biomedical Engineering

Alastair Stacey Author Physics

David Garrett Author Physics

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Grants

Awarded by NHMRC

Awarded by National Health and Medical Research Council (NHMRC) of Australia

Awarded by Australian Research Council (ARC)

Funding Acknowledgements

The work was performed in part at the Melbourne Centre for Nanofabrication (MCN) in the Victorian Node of the Australian National Fabrication Facility (ANFF). The authors also appreciate the access granted to the facilities, and the scientific and technical assistance, of the Australian Microscopy & Microanalysis Research Facility at RMIT University. This work was supported by a CASS Foundation (Medicine and Science) Grant. DJG is supported by NHMRC Project Grant GNT1101717 and by an Australian Nanofabrication Facility (ANFF)/Melbourne Centre for Nanofabrication (MCN) Technology Ambassador Fellowship. KEF is supported by the Clive and Vera Ramaciotti Foundation and acknowledges the Australian Research Council (ARC) for funding (IC160100026). The research was supported by a Development Grant from The National Health and Medical Research Council (NHMRC, GNT1118223) of Australia and a Linkage Project Grant from the Australian Research Council (ARC, LP160101515).