Journal article

Photonic devices fabricated from (111)-oriented single crystal diamond

Blake Regan, Sejeong Kim, Anh TH Ly, Aleksandra Trycz, Kerem Bray, Kumaravelu Ganesan, Milos Toth, Igor Aharonovich

InfoMat | Wiley | Published : 2020

Abstract

Diamond is a material of choice in the pursuit of integrated quantum photonic technologies. So far, the majority of photonic devices fabricated from diamond are made from (100)‐oriented crystals. In this work, we demonstrate a methodology for the fabrication of optically active membranes from (111)‐oriented diamond. We use a liftoff technique to generate membranes, followed by chemical vapor deposition of diamond in the presence of silicon to generate homogenous silicon vacancy color centers with emission properties that are superior to those in (100)‐oriented diamond. We further use the diamond membranes to fabricate microring resonators with quality factors exceeding ~ 3000. Supported by f..

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Grants

Awarded by Australian Research Council


Funding Acknowledgements

Office of Naval Research Global; Research and Development; Australian Research Council, Grant/Award Numbers: DP180100077, DP190101058