Versatile direct-writing of dopants in a solid state host through recoil implantation
Johannes E Froch, Alan Bahm, Mehran Kianinia, Zhao Mu, Vijay Bhatia, Sejeong Kim, Julie M Cairney, Weibo Gao, Carlo Bradac, Igor Aharonovich, Milos Toth
NATURE COMMUNICATIONS | NATURE RESEARCH | Published : 2020
Modifying material properties at the nanoscale is crucially important for devices in nano-electronics, nanophotonics and quantum information. Optically active defects in wide band gap materials, for instance, are critical constituents for the realisation of quantum technologies. Here, we demonstrate the use of recoil implantation, a method exploiting momentum transfer from accelerated ions, for versatile and mask-free material doping. As a proof of concept, we direct-write arrays of optically active defects into diamond via momentum transfer from a Xe+ focused ion beam (FIB) to thin films of the group IV dopants pre-deposited onto a diamond surface. We further demonstrate the flexibility of ..View full abstract
Awarded by Australian Research Council
Awarded by Singapore Ministry of Education
Awarded by Asian Office of Aerospace Research and Development
The authors thank the Australian Research Council (DP180100077, DE180100810, DP190101058, LP170100150), Singapore Ministry of Education (MOE2016-T2-2-077, MOE2016-T2-1-163, MOE2016-T3-1-006 (S)), the Asian Office of Aerospace Research and Development (FA9550-19-S-0003) and A*Star QTE programme for financial support. The authors acknowledge the facilities, and the scientific and technical assistance, of Microscopy Australia at the University of Sydney.