High-resolution Rutherford backscattering spectrometry with an optimised solid-state detector
SG Robson, AM Jakob, D Holmes, SQ Lim, BC Johnson, DN Jamieson
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms | ELSEVIER | Published : 2021
Awarded by Australian Research Council Centre of Excellence for Quantum Computation and Communication Technology
Awarded by International Atomic Energy Agency, Austria through the Cooperative Research Program
We gratefully acknowledge the technical assistance of S. Gregory and R. Szymanski. We thank T. Schenkel of the Lawrence Berkeley National Laboratory for providing the enriched silicon. This research was funded by the Australian Research Council Centre of Excellence for Quantum Computation and Communication Technology (CE170100012). This work was performed in part at the Melbourne Centre for Nanofabrication (MCN) in the Victorian Node of the Australian National Fabrication Facility (ANFF). We acknowledge the AFAiiR node of the NCRIS Heavy Ion Capability for access to ion-implantation facilities and the support of the International Atomic Energy Agency, Austria through the Cooperative Research Program number F11020 ``Ion beam induced spatio-temporal structural evolution of materials: Accelerators for a new technology era''.