High-resolution Rutherford backscattering spectrometry with an optimised solid-state detector
SG Robson, AM Jakob, D Holmes, SQ Lim, BC Johnson, DN Jamieson
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | ELSEVIER | Published : 2021
Rutherford Backscattering Spectrometry (RBS) is a powerful ion beam analysis technique in frequent use within materials science. The recent emergence of targets incorporating complex features such as ultra-scaled diffusion barriers and isotopically-enriched films has started to push the limits of the technique, necessitating the expanded use of systems with a higher energy resolution. The increased cost and complexity of these systems based on already well-established schemes may present a barrier to their more widespread adoption. Here, we present an RBS detection system specifically designed for simple integration into existing nuclear probe infrastructure, but with a considerably higher e..View full abstract
Awarded by Australian Research Council Centre of Excellence for Quantum Computation and Communication Technology
Awarded by International Atomic Energy Agency, Austria through the Cooperative Research Program
We gratefully acknowledge the technical assistance of S. Gregory and R. Szymanski. We thank T. Schenkel of the Lawrence Berkeley National Laboratory for providing the enriched silicon. This research was funded by the Australian Research Council Centre of Excellence for Quantum Computation and Communication Technology (CE170100012). This work was performed in part at the Melbourne Centre for Nanofabrication (MCN) in the Victorian Node of the Australian National Fabrication Facility (ANFF). We acknowledge the AFAiiR node of the NCRIS Heavy Ion Capability for access to ion-implantation facilities and the support of the International Atomic Energy Agency, Austria through the Cooperative Research Program number F11020 ``Ion beam induced spatio-temporal structural evolution of materials: Accelerators for a new technology era''.