Nanostructured copper oxides as ethanol vapour sensors
Ahmad Sabirin Zoolfakar, Muhammad Zamharir Ahmad, Rozina Abdul Rani, Jian Zhen Ou, Sivacarendran Balendhran, Serge Zhuiykov, Kay Latham, Wojtek Wlodarski, Kourosh Kalantar-Zadeh
Sensors and Actuators B Chemical | ELSEVIER SCIENCE SA | Published : 2013
We report on ethanol (C H OH) vapour sensing devices based on nanostructured cupric oxide (CuO) and cuprous oxide (Cu O) thin films, which are deposited using RF sputtering at relatively low temperature and power conditions: at 120 C, single stoichiometry CuO and Cu O films are deposited using the sputtering power of 200 and 250 W, respectively. At such sputtering conditions CuO films exhibit smaller nanocrystallite base dimensions (~30 nm), in comparison to Cu O films (~85 nm), which significantly enhance surface area to volume ratio. Both nanostructured CuO and Cu O gas sensors are able to detect ethanol vapour as low as several ppm and at relatively low operating temperatures of 180 and ..View full abstract
Special thanks are extended to Mr. Ching-Liang Wei for his wonderful assistance and knowledge which he shared with the group on implementation of the RF sputtering technique. ASZ also would like to acknowledge the Ministry of Science, Technology and Innovation Malaysia (MOSTI) and Universiti Teknologi MARA for financial assistance.