Conference Proceedings

Single phosphorus ions implantation into prefabricated nanometre cells of silicon devices for quantum qubits fabrication

undefined Changyi Yang, DN Jamieson, C Pakes, S Prawer, A Dzurak, F Stanley, RG Clark, L Macks, D George, P Spizziri, E Gauja

2002 International Microprocesses and Nanotechnology Conference, 2002. Digest of Papers. | Japan Soc. Appl. Phys