Conference Proceedings

In situ TEM study of reactions in iron amorphous carbon layered thin films

T Itoh, R Sinclair, TD Nguyen (ed.), BM Lairson (ed.), BM Clemens (ed.), SC Shin (ed.), K Sato (ed.)

STRUCTURE AND PROPERTIES OF MULTILAYERED THIN FILMS | MATERIALS RESEARCH SOC | Published : 1995

Abstract

ABSTRACTReactions between Fe and amorphous carbon (a-C) below 600ºC have been investigated. In situ annealing in a transmission electron microscopy (TEM) was performed on a-C/Fe/a-C trilayer films deposited by DC sputtering. As-deposited films showed a well defined tri-layered structure and an average Fe grain size of about 50Å. Cementite (Fe3C) grains appeared in the Fe layer by annealing around 300ºC. As the annealing temperature was raised, the number and size of the cementite grains increased. When the annealing temperature reached 500ºC, the Fe layer completely turned into cementite with an average grain size of 1000Å. At this point the film still kept a well defined tri-layered structu..

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