Journal article

Meander Thin-Film Biosensor Fabrication to Investigate the Influence of Structural Parameters on the Magneto-Impedance Effect

Abkar Sayad, Shah Mukim Uddin, Jianxiong Chan, Efstratios Skafidas, Patrick Kwan

SENSORS | MDPI | Published : 2021

Abstract

Thin-film magneto-impedance (MI) biosensors have attracted significant attention due to their high sensitivity and easy miniaturization. However, further improvement is required to detect weak biomagnetic signals. Here, we report a meander thin-film biosensor preparation to investigate the fabrication parameters influencing the MI effect. Specifically, we hypothesized that an optimal film thickness and sensing area size ratio could be achieved to obtain a maximum MI ratio. A meander multilayer MI biosensor based on a NiFe/Cu/NiFe thin-film was designed and fabricated into 3-, 6-, and 9-turn models with film thicknesses of 3 µm and 6 µm. The 9-turn biosensor resembled the largest sensing area..

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Grants

Awarded by Medical Research Future Fund Practitioner Fellowship


Funding Acknowledgements

This work was performed in part at the Melbourne Centre for Nanofabrication (MCN) in the Victorian Node of the Australian National Fabrication Facility (ANFF). P.K is supported by a Medical Research Future Fund Practitioner Fellowship (MRF1136427). A.S. is supported by a Monash Graduate Scholarship.