Journal article
Graphene-Enhanced Single Ion Detectors for Deterministic Near-Surface Dopant Implantation in Diamond
NFL Collins, AM Jakob, SG Robson, SQ Lim, P Räcke, BC Johnson, B Liu, Y Lu, D Spemann, JC McCallum, DN Jamieson
Advanced Functional Materials | WILEY-V C H VERLAG GMBH | Published : 2023
Abstract
Diamond color centers with applications to single photon sources, quantum computation, and magnetic field sensing down to the nanoscale have been investigated using ensembles of near-surface implanted atoms. Deterministic ion implantation for ions stopping between 30 and 130 nm deep is demonstrated by configuring an electronic-grade diamond substrate with a biased surface graphene electrode connected to charge sensitive electronics. The thin graphene electrode has a negligible surface dead layer, so implantation events are signaled from the drift of electron–hole pairs induced by the dissipation of ion kinetic energy in the substrate. Ion beam induced charge maps from a scanned 1 MeV He micr..
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Grants
Awarded by Army Research Office
Funding Acknowledgements
This work was funded by the Australian Research Council center of Excellence for Quantum Computation and Communication Technology (Grant No. CE170100012), the U.S. Army Research Office (Contract No. W911NF-17-1-0200) and the International Atomic Energy Agency Cooperative Research Program, Ion beam induced spatiotemporal structural evolution of materials: Accelerators for a new technology era, CRP No: F11020. This work was performed in part at the Melbourne center for Nanofabrication (MCN) in the Victorian Node of the Australian National Fabrication Facility (ANFF). The authors acknowledge access to the NCRIS facilities (ANFF and Heavy Ion Accelerator Capability) at the Australian National University. N.F.L.C acknowledges additional travel support from the Laby Foundation. N.F.L.C. and S.G.R. acknowledge support from an Australian Government Research Training Program Scholarship. P.R. and D.S. gratefully acknowledge funding by the Leibniz Association (SAW2015-IOM-1) and the European Union, together with the Saechsisches Ministerium fur Wissenschaft und Kunst (Project No. 100308873). P.R. gratefully acknowledges funding by the Federal Ministry of Education and Research under grant no. 13N16097 (CoGeQ).