A wide linearity range and high sensitivity flexible pressure sensor with hierarchical microstructures: via laser marking

Abstract

Developing high sensitivity and broad linearity range flexible pressure sensors has become a key challenge in the field of human-machine interfaces, health monitoring, and electronic skin (E-skin). Here, we proposed a simple, customizable, and low-cost method to construct novel hierarchical microstructures via a laser marking technique, and we achieved a flexible pressure sensor with high performance. Our pressure sensor based on the novel hierarchical microstructures showed a high sensitivity of 15.4 kPa-1 in a broad linearity range over 200 kPa. The sensing performances were greatly enhanced when compared with the regular hemispherical microstructure-based pressure sensors. Note, the high ..