Three-dimensional ion micro-tomography

Abstract

The technique of ion micro-tomography (IMT) provides three-dimensional distribution information about a sample's mass density and elemental composition. The required data are obtained by doing a scanning transmission ion microscopy (STIM) tomography experiment followed by a particle-induced X-ray emission (PIXE) tomography experiment. The experiment times have been vastly reduced now that data are collected with MicroDAS, the new fast data acquisition system. Moreover, the experiment is easier to perform because sample manipulation is automated via computer control. To obtain comparable spatial resolutions between the STIM and PIXE data, the PIXE tomography experiment is performed by impleme..