Journal article

Technology computer-aided design modelling of single-atom doping for fabrication of buried nanostructures

CI Pakes, DP George, DN Jamieson, CJ Yang, AS Dzurak, E Gauja, RG Clark

Nanotechnology | IOP PUBLISHING LTD | Published : 2003

DOI: 10.1088/0957-4484/14/2/311

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Keywords

Nanoscience & Nanotechnology
Physical Sciences
Physics
Technology
Silicon
Materials Science, Multidisciplinary
Science & Technology
Science & Technology - Other Topics
Materials Science
Physics, Applied