The spatial resolution of imaging using core-loss spectroscopy in the scanning transmission electron microscope

Abstract

The 'delocalization' of inelastic scattering is an important issue for the ultimate spatial resolution of core-loss spectroscopy in the electron microscope. This paper investigates the resolution of scanning transmission electron microscopy images for single, isolated atoms. Images are simulated from first principles using a nonlocal model for electron core-loss spectroscopy. The role of the width of the probe relative to the delocalization of the underlying ionization interaction is considered. © 2004 Elsevier B.V. All rights reserved.