Journal article

Ion beam lithography using single ions

A Alves, P Reichart, R Siegele, PN Johnston, DN Jamieson

Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms | ELSEVIER SCIENCE BV | Published : 2006

DOI: 10.1016/j.nimb.2006.03.128

University of Melbourne Researchers

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11Web of Science
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Keywords

Fabrication
Physical Sciences
Physics
Photonic Crystals
Ion Beam Lithography
Pmma
Technology
Single Ion Counting
Nuclear Microprobe
Science & Technology
Physics, Nuclear
Latent Damage
Polymers
Instruments & Instrumentation
Physics, Atomic, Molecular & Chemical
Nuclear Science & Technology
Tracks
High Aspect Ratio Structures
Ion Tracks
Track Etching