Journal article

Characterization of three-dimensional microstructures in single-crystal diamond

P Olivero, S Rubanov, P Reichart, BC Gibson, ST Huntington, JR Rabeau, Andrew D Greentree, J Salzman, D Moore, DN Jamieson, S Prawer

DIAMOND AND RELATED MATERIALS | ELSEVIER SCIENCE SA | Published : 2006

Abstract

We report on the Raman and photoluminescence characterization of three-dimensional microstructures fabricated in single crystal diamond with a Focused Ion Beam (FIB) assisted lift-off technique. The fabrication method is based on MeV ion implantation, followed by FIB micropatterning and selective chemical etching. In a previous publication we reported on the fabrication of a micro-bridge structure exhibiting waveguiding behavior [P. Olivero, S. Rubanov, P. Reichart, B. Gibson, S. Huntington, J. Rabeau, Andrew D. Greentree, J. Salzman, D. Moore, D. N. Jamieson, S. Prawer, Adv. Mater., 17 (20) (2005) 2427]. In the present work, Raman and photoluminescence spectroscopies are employed to charact..

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