Conference Proceedings

Integration of single ion implantation method in focused ion beam system for nanofabrication

C Yang, DN Jamieson, S Hearne, T Hopf, C Pakes, S Prawer, SE Andresen, A Dzurak, E Gauja, FE Hudson, RG Clark

Proceedings of the 2006 International Conference on Nanoscience and Nanotechnology | Published : 2006