Journal article

Nanofabrication processes for single-ion implantation of silicon quantum computer devices

RP McKinnon, FE Stanley, NE Lumpkin, E Gauja, LD Macks, M Mitic, V Chan, K Peceros, TM Buehler, AS Dzurak, RG Clark, C Yang, DN Jamieson, SD Prawer

Smart Materials and Structures | IOP PUBLISHING LTD | Published : 2002