Atomic scattering factors for K-shell electron energy-loss spectroscopy

Abstract

Atomic scattering factors for K-shell electron energy-loss spectroscopy (EELS) have been calculated for elements in the range Z = 6 (carbon) to Z = 50 (tin). The calculations are based on relativistic Hartree-Fock wave functions for the atomic bound states and Hartree-Slater wave functions for the continuum states. The results are presented in parameterized form so that accurate values of the scattering factors can be obtained for incident electron energies between 50 and 400 keV, collection semi-angles between 10 and 40 mrad, and energy windows between 25 and 100 eV. The parameterizations are for scattering vectors with magnitude s = sin theta/lambda up to 2.5 A(-1) (2 theta is the scatteri..