Focused microprobes of high energy ions - versatile analytical probes for surfaces, interfaces and devices

Abstract

Today, more than 50 laboratories world-wide (including more than seven in Japan and three in Australia) apply focused microprobes of high-energy ions to a wide range of problems involving materials analysis. MeV ions penetrate deeply into matter and can therefore be used to probe and image surface and deeply buried structures. High sensitivity (ppm) trace analysis is possible from induced X-rays and backscattered particles can be used to measure stoichiometry and produce depth profiles down to about 10μm below the specimen surface. The forward recoil of hydrogen displaced by heavier ions can be used to map the hydrogen distribution. Induced charge can be collected, so images of the charge co..