Single atom Si nanoelectronics using controlled single-ion implantation

M Mitic, SE Andresen, C Yang, T Hopf, V Chan, E Gauja, FE Hudson, TM Buehler, R Brenner, AJ Ferguson, CI Pakes, SM Hearne, G Tamanyan, DJ Reilly, AR Hamilton, DN Jamieson, AS Dzurak, RG Clark