Frequency response of cantilever beams immersed in viscous fluids with applications to the atomic force microscope: Arbitrary mode order

Abstract

The frequency response of a cantilever beam is well known to depend strongly on the fluid in which it is immersed. In this article, we present a theoretical model for the frequency response of a rectangular cantilever beam immersed in a viscous fluid that enables the flexural and torsional modes of arbitrary order to be calculated. This extends the previous models of Sader and Green [J. Appl. Phys. 84, 64 (1998); 92, 6262 (2002)], which were formulated primarily for the fundamental mode and the next few harmonics, to the general case of arbitrary mode order by accounting for the three-dimensional nature of the flow field around the cantilever beam. Due to its importance in atomic force micro..