Journal article

Damage studies in dry etched textured silicon surfaces

G Kumaravelu, MM Alkaisi, A Bittar, D Macdonald, J Zhao

CURRENT APPLIED PHYSICS | ELSEVIER | Published : 2004

DOI: 10.1016/j.cap.2003.10.008

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Keywords

Multicrystalline
Reactive Ion Etching
Technology
Physical Sciences
Physics
Solar Cell
Surface Texturing
Science & Technology
Physics, Applied
Materials Science
Photoconductance
Materials Science, Multidisciplinary