THE PHASE AND INVERSION PROBLEM FOR MULTIPLY SCATTERED ELECTRONS

Abstract

The inversion of scattering data to obtain the structure of a thin specimen illuminated by electrons is discussed. The inversion problem has two aspects, the reconstruction of one or more exit surface wave functions and the subsequent retrieval of the projected structure of the specimen. The second step is complicated by the fact that electrons interact strongly with matter and multiple scattering complicates the inversion problem unless the specimen is very thin, particularly in the case of crystalline specimens. © 2008 World Scientific Publishing Company.