Journal article

Three-dimensional imaging in double aberration-corrected scanning confocal electron microscopy, Part I: Elastic scattering

EC Cosgriff, AJ D'Alfonso, LJ Allen, SD Findlay, AI Kirkland, PD Nellist



A transmission electron microscope fitted with both pre-specimen and post-specimen spherical aberration correctors enables the possibility of aberration-corrected scanning confocal electron microscopy. Imaging modes available in this configuration can make use of either elastically or inelastically scattered electrons. In this paper we consider image contrast for elastically scattered electrons. It is shown that there is no linear phase contrast in the confocal condition, leading to very low contrast for a single atom. Multislice simulations of a thicker crystalline sample show that sample vertical location and thickness can be accurately determined. However, buried impurity layers do not gi..

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University of Melbourne Researchers


Awarded by Grants-in-Aid for Scientific Research

Funding Acknowledgements

Aj. D'Alfonso acknowledges support from the Australian Microscopy and Microanalysis Society, the Australian Research Network for Advanced Materials and the assistance of the Postgraduate Overseas Research Experience Scholarship program at the University of Melbourne. Lj. Allen acknowledges support by the Australian Research Council. A.I. Kirkland and RD. Nellist acknowledge financial support from The University of Oxford, JEOL Ltd. and the EPSRC.