Depth sectioning using electron energy loss spectroscopy
AJ D'Alfonso, EC Cosgriff, SD Findlay, AI Kirkland, PD Nellist, MP Oxley, LJ Allen, RT Baker (ed.), G Mobus (ed.), PD Brown (ed.)
EMAG: ELECTRON MICROSCOPY AND ANALYSIS GROUP CONFERENCE 2007 | IOP PUBLISHING LTD | Published : 2008
The continued development of electron probe aberration correctors for scanning transmission electron microscopy has enabled finer electron probes, allowing atomic resolution column-by-column electron energy loss spectroscopy. Finer electron probes have also led to a decrease in the probe depth of focus, facilitating optical slicing or depth sectioning of samples. The inclusion of post specimen aberration corrected image forming lenses allows for scanning confocal electron microscopy with further improved depth resolution and selectivity. We show that in both scanning transmission electron microscopy and scanning confocal electron microscopy geometries, by performing a three dimensional raste..View full abstract
Awarded by U.S. Department of Energy
This researchwas also partly sponsored by the Office of Basic Energy Sciences, Division of Materials Sciences and Engineering, U.S. Department of Energy, under contract DE-AC05-00OR22725 with Oak Ridge National Laboratory, managed and operated by UT-Battelle, LLC and by appointment to the ORNL Postdoctoral Research Program administered jointly by ORNL and ORISE.