High-Quality ZnxMg1−xO Thin Films Deposited from a Single Molecular Source. Intimate Mixing as a Means to Improved Film Properties

Abstract

Zn x Mg1−x O thin films have been deposited for the first time by single-source chemical vapor deposition (SSCVD). The films were grown using novel heterobimetallic Zn/Mg carbamato cluster complexes as single-source precursors. Films were characterized with X-ray diffraction, X-ray photoelectron spectroscopy, and scanning electron microscopy, and were found to possess a single preferred crystallite orientation, high purity with consistent elemental makeup throughout the film bulk, and a dense columnar morphology. Further investigations into the films’ structures were performed using cathodoluminescence, and it was found that the incorporation of magnesium into the crystal lattice successfull..