Quantitative coherent diffractive imaging of an integrated circuit at a spatial resolution of 20 nm
Brian Abbey, Garth J Williams, Mark A Pfeifer, Jesse N Clark, Corey T Putkunz, Angela Torrance, Ian McNulty, TM Levin, Andrew G Peele, Keith A Nugent
Applied Physics Letters | AMER INST PHYSICS | Published : 2008
Awarded by U. S. Department of Energy, Office of Science, and Office of Basic Energy Sciences
We acknowledge the support of the Australian Research Council Centre of Excellence for Coherent X-ray Science and the Australian Synchrotron Research Program. Use of the Advanced Photon Source was supported by the U. S. Department of Energy, Office of Science, and Office of Basic Energy Sciences, under Contract No. DE-AC02-06CH11357.