Journal article
Quantitative coherent diffractive imaging of an integrated circuit at a spatial resolution of 20 nm
B Abbey, GJ Williams, MA Pfeifer, JN Clark, CT Putkunz, A Torrance, I McNulty, TM Levin, AG Peele, KA Nugent
Applied Physics Letters | AMER INST PHYSICS | Published : 2008
DOI: 10.1063/1.3025819
Abstract
The complex transmission function of an integrated circuit is reconstructed at 20 nm spatial resolution using coherent diffractive imaging. A quantitative map is made of the exit surface wave emerging from void defects within the circuit interconnect. Assuming a known index of refraction for the substrate allows the volume of these voids to be estimated from the phase retardation in this region. Sample scanning and tomography of extended objects using coherent diffractive imaging is demonstrated. © 2008 American Institute of Physics.
Grants
Awarded by U.S. Department of Energy
Funding Acknowledgements
We acknowledge the support of the Australian Research Council Centre of Excellence for Coherent X-ray Science and the Australian Synchrotron Research Program. Use of the Advanced Photon Source was supported by the U. S. Department of Energy, Office of Science, and Office of Basic Energy Sciences, under Contract No. DE-AC02-06CH11357.