Controlled synthesis of high quality micro/nano-diamonds by microwave plasma chemical vapor deposition
Alastair Stacey, Igor Aharonovich, Steven Prawer, James E Butler
DIAMOND AND RELATED MATERIALS | ELSEVIER SCIENCE SA | Published : 2009
Diamond containing engineered color centers is rapidly becoming a medium of choice for quantum information applications. Many of the dramatic recent results in this field have been demonstrated in diamond nano-crystals. Here we demonstrate controlled synthesis of spatially isolated high quality micro- and nano-diamonds using a microwave plasma chemical vapor deposition technique (MPCVD). The growth from nano-seeds rather than other nucleation techniques allows improved control over the final size of the crystals and the density of the crystals on the substrate. The growth rate of the diamond crystals was found to be 22 nm/min. Various parameters of the growth sequence were studied and the mi..View full abstract
The support of the Australian Research Council (ARC), and the Department of Innovation, Industry, Science and Research (DIISR) is gratefully acknowledged. This work is also supported by the European Union Sixth Framework under the EQUIND consortium. JEB acknowledges support from the Office of Naval Research/Naval Research Laboratory. We are thankful to A. Cimmino for AFM measurements and A. D. Greentree for helpful discussions.