Conference Proceedings

A TEM study of Si-Si02 interfaces in silicon nanodevices

P SPIZZIRRI, S RUBANOV, E Gauja, H Willems van Beveren, R Brenner, S PRAWER

15th Australian Conference on Nuclear and Complementary Techniques ofAnalysis & 9th Vacuum Society ofAustralia Congress proceedings | Australian Institute of Nuclear Science and Engineering | Published : 2007