Conference Proceedings

An EPR study on the activation of low energy phosphorus ions implanted into silicon

P SPIZZIRRI, J MCCALLUM, W Hutchison, N Suwunatasarn, N Bulatovic, N STAVRIAS, S PRAWER

15th Australian Conference on Nuclear and Complementary Techniques ofAnalysis & 9th Vacuum Society ofAustralia Congress proceedings | Australian Institute of Nuclear Science and Engineering | Published : 2007