Adaptive control strategy for micro/nano manipulation systems

Abstract

Micro/nano manipulation has been identified as one of the key enabling technologies for many emerging areas of application. Within this scope, piezoelectric actuators have played a major role in achieving the required nano-resolution motion. This paper proposes an adaptive control strategy for the manipulation systems driven by piezoelectric actuators to follow specified motion trajectories. This is motivated by a search for an effective control methodology to deal with the problem of parametric uncertainties such as disturbance and hysteresis effects. The proposed adaptive strategy is formulated by introducing a parameter compensator for a system to drive its position tracking error to conv..