Journal article

Damage layers in Si vs. ion dose during 30 keV FIB milling

S Rubanov

Microscopy and Microanalysis | CAMBRIDGE UNIV PRESS | Published : 2009

DOI: 10.1017/S1431927609098638

Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

University of Melbourne Researchers

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Keywords

31 Biological Sciences
Materials Science
Microscopy
Materials Science, Multidisciplinary
Technology
3101 Biochemistry and Cell Biology
4016 Materials Engineering
Science & Technology
40 Engineering