Journal article

Single-source chemical vapor deposition of clean oriented Al2O3 thin films

Xiaofei Duan, Nguyen H Tran, Nicholas K Roberts, Robert N Lamb

Thin Solid Films | ELSEVIER SCIENCE SA | Published : 2009

University of Melbourne Researchers


Awarded by ARC Discovery Project grant scheme

Funding Acknowledgements

We would like to thank Dr. Bill Gong, The University of New South Wales, for the XPS data acquisition, processing and valuable discussion. Funding from the Australian Research Council through the ARC Discovery Project grant scheme (grant no. DP06669911) is acknowledged.