Single-source chemical vapor deposition of clean oriented Al2O3 thin films
Xiaofei Duan, Nguyen H Tran, Nicholas K Roberts, Robert N Lamb
Thin Solid Films | ELSEVIER SCIENCE SA | Published : 2009
Awarded by ARC Discovery Project grant scheme
We would like to thank Dr. Bill Gong, The University of New South Wales, for the XPS data acquisition, processing and valuable discussion. Funding from the Australian Research Council through the ARC Discovery Project grant scheme (grant no. DP06669911) is acknowledged.