Journal article

High-Q microfluidic cavities in silicon-based two-dimensional photonic crystal structures

Uwe Bog, Cameron LC Smith, Michael W Lee, Snjezana Tomljenovic-Hanic, Christian Grillet, Christelle Monat, Liam O'Faolain, Christian Karnutsch, Thomas F Krauss, Ross C McPhedran, Benjamin J Eggleton



We demonstrate postprocessed microfluidic double-heterostructure cavities in silicon-based photonic crystal slab waveguides. The cavity structure is realized by selective fluid infiltration of air holes using a glass microtip, resulting in a local change of the average refractive index of the photonic crystal. The microcavities are probed by evanescent coupling from a silica nanowire. An intrinsic quality factor of 57,000 has been derived from our measurements, representing what we believe to be the largest value observed in microfluidic photonic crystal cavities to date.

University of Melbourne Researchers


Funding Acknowledgements

The support of the Australian Research Council through its Federation Fellow, Centre of Excellence and Discovery grant programs is gratefully acknowledged. Additional acknowledgment is given to the support of the School of Physics, University of Sydney, through its Denison Foundation and the International Science Linkages (ISL) program by the Department of Education, Science, and Training (DEST) ISL DEST grant. The silicon samples were fabricated in the framework of the EU-FP6 funded ePIXnet Nanostructuring Platform for Photonic Integration (