Journal article
Towards characterisation of millimetre length waveguides and new fabrication method for nanoscale diamond photonic structures
MP Hiscocks, K Ganesan, WR McKenzie, BC Gibson, F Ladouceur, S Prawer
Diamond and Related Materials | Published : 2011
Abstract
We present a novel approach to achieving in-plane coupling for ridge waveguides fabricated in single crystal diamond through a modification to the graphitic implant process. The etched cross-section of a diamond ridge structure is examined to confirm roughness estimates and the trenching effect. Finally nanoscale optical cavities are fabricated in polycrystalline diamond using a new method of exposure using focussed ion beam as a hard mask to pattern the structures. © 2011 Elsevier B.V.
Grants
Funding Acknowledgements
The authors thank Mr. Hafiz for silica deposition. This project is proudly supported by the International Science Linkages programme established under the Australian Government's innovation statement Backing Australia's Ability. The authors wish to also acknowledge the Victorian Government's Science, Technology & Innovation Infrastructure Grants Program for the funding of this project.