Journal article
Fabrication of polycrystalline aluminum oxide thin films via hydrolysis and hydrothermal reactions in solutions
X Duan, I Liaw, NH Tran, RN Lamb
Thin Solid Films | ELSEVIER SCIENCE SA | Published : 2011
Abstract
Polycrystalline Al2O3 thin films were fabricated through a method combining urea hydrolysis and hydrothermal reactions. The overall growth temperature of these films was achieved as low as 150 °C. Although cracks occurred across the gel film after hydrolysis, a subsequent nucleation under elevated pressure and temperature resulted in a closely packed morphology. Moreover, the hydrothermal treatment led to high oxide content and an increase in crystallinity within the films. © 2011 Elsevier B.V.
Grants
Funding Acknowledgements
We would like to thank Dr. Bin Gong (University of New South Wales) and Mr. Frank Antolasic (Royal Melbourne Institute of Technology) for acquiring XPS and XRD results, respectively. We also acknowledge David Hay Memorial (University of Melbourne) Fund for supporting the writing-up of this work.