Conference Proceedings
A lateral carrier depletion structure suitable for mass production of silicon optical modulators
CJ Chae, E Skafidas
16th Opto Electronics and Communications Conference Oecc 2011 | Published : 2011
Abstract
A novel silicon optical modulator structure, consisting of forward- and reverse-biased pn junctions, is proposed to make it suitable for mass production with reduced fabrication process steps. © 2011 National Sun Yat-Sen Univ.