Nanolithography of organic films using scanning probe microscopy

Abstract

Patterning of polymeric materials in nanoscale dimensions has attracted attention because of its perceived applications in the fabrication of data storage devices, optoelectronics, displays and nanosensors. Recently, the scanning probe microscope (SPM) has been used to manipulate and pattern soft materials down to atomic resolution. This chapter highlights the similarities and differences between the various AFM-based nanolithography techniques for nanopatterning using electrostatic and electrochemical methods, and provides a brief overview of the challenges and future developments. The principles and specific approaches underlying each technique for nanopattern formation are discussed in de..