Integration of single ion implantation method in focused ion beam system for nanofabrication
Changyi Yang, David N Jamieson, Sean Hearne, Toby Hopf, Chris Pakes, Steven Prawer, Soren E Andresen, Andrew Dzurak, Eric Gauja, Fay E Hudson, Robert G Clark
2006 INTERNATIONAL CONFERENCE ON NANOSCIENCE AND NANOTECHNOLOGY, VOLS 1 AND 2 | IEEE | Published : 2006
Awarded by Army Research Office (ARO)
This work was supported by the Australian Research Council, the Australian Government, and the US National Security Agency (NSA), Advanced Research and Development Activity (ARDA), and the Army Research Office (ARO) under contract number W911NF-04-1-0290.