Microbeam imaging at micron and submicron resolution

Abstract

The accurate location, identification and irradiation of a specimen in a scanning proton microprobe or similar instrument and the correct interpretation of the collected data often depends critically on the spatial resolution and information content of any images that can be formed. The accommodation of all imaging requirements in turn places severe demands on the instrumentation. The imaging techniques discussed include light optical, secondary electron, PIXE, backward and forward scattering, channeling contrast and transmission imaging with energy loss and scattering contrast. The images may be bright field or dark field and live or processed and they make available a wide range of informa..