Journal article
MICROBEAM IMAGING AT MICRON AND SUBMICRON RESOLUTION
GJF LEGGE, CD MCKENZIE, AP MAZZOLINI, RM SEALOCK, DN JAMIESON, PM OBRIEN, JC MCCALLUM, GL ALLAN, RA BROWN, RA COLMAN, BJ KIRBY, MA LUCAS, J ZHU, J CERINI
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | ELSEVIER SCIENCE BV | Published : 1986