Journal article

MICROBEAM IMAGING AT MICRON AND SUBMICRON RESOLUTION

GJF LEGGE, CD MCKENZIE, AP MAZZOLINI, RM SEALOCK, DN JAMIESON, PM OBRIEN, JC MCCALLUM, GL ALLAN, RA BROWN, RA COLMAN, BJ KIRBY, MA LUCAS, J ZHU, J CERINI

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | ELSEVIER SCIENCE BV | Published : 1986