Journal article

2 MEV HE MICROBEAM DAMAGE IN SI AND GAAS

RA BROWN, JC MCCALLUM, JS WILLIAMS

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | ELSEVIER SCIENCE BV | Published : 1991

DOI: 10.1016/0168-583X(91)95513-D

University of Melbourne Researchers

Jeffrey McCallum Author Physics

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13Web of Science

Keywords

Physics, Nuclear

Instruments & Instrumentation

Nuclear Science & Technology

Science & Technology

Physical Sciences

Physics, Atomic, Molecular & Chemical