Journal article

Fabrication and characterization of PECVD silicon nitride for RF MEMS applications

HU Rahman, BC Johnson, JC Mccallum, E Gauja, R Ramer

Microsystem Technologies | SPRINGER HEIDELBERG | Published : 2013

DOI: 10.1007/s00542-012-1522-0

University of Melbourne Researchers

Brett Johnson Author Physics

Jeffrey McCallum Author Physics

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3Web of Science

Keywords

Science & Technology

Physical Sciences

Physics, Applied

Materials Science, Multidisciplinary

Science & Technology - Other Topics

Engineering, Electrical & Electronic

Nanoscience & Nanotechnology

Materials Science