Conference Proceedings

Hydrogen Platelet Evolution in Mechanically Strained Silicon

DJ Pyke, RG Elliman, JC McCallum

PROCEEDINGS OF 2010 CONFERENCE ON OPTOELECTRONIC AND MICROELECTRONIC MATERIALS AND DEVICES (COMMAND 2010) | IEEE | Published : 2010

Abstract

The effect of intrinsic and applied stress on hydrogen diffusion and trapping are studied by elastic-recoil detection (ERD), Rutherford backscattering and channelling (RBS-C) and transmission electron microscopy (TEM). © 2010 IEEE.